The high precision aluminum vacuum chucks are designed and fabricated to use on KW-4A spin coater of MicroNano Tools in order to maximize your flexibility with your specific research and development objectives. The standard round vacuum chucks are made for round substrate/wafer sizes of 5,10, 12.5, 15, 17.5, 20, 25, 30, 35, 40, 50, 60, 70, 75, and 100 mm. Vacuum chucks of other sizes or ultra thin or ultra thick are also available at additional cost. For ultra thin substrate to be coated, its smallest thickness is 0.025 mm (0.001 inch) and its lateral size should be equal or larger than 30x30 mm. The structure of vacuum chucks for ultra thin samples are different from that of conventional vacuum chuck. It has micro holes at the bottom plate and has a cover plate. It is also called complex vacuum chuck.
Diameter of wafers SHOULD ALWAYS slightly larger than that of the vacuum chucks with vacuum channels on it. Otherwise, the coating chemicals may be sucked into the vacuum system.
A good match between substrates and high precision aluminum vacuum chucks will significantly increase thickness uniformity of spin-coated film, hence improve its performance and desired properties.
The dense grooves on the vacuum chucks will also contribute to thickness uniformity by minimizing any possible warpage of the substrates during spin coating after vacuum is applied. 25 vacuum grooves are made along the radius direction for 100 mm wafer size.
Please indicate the shape and size of the vacuum chucks you selected by clicking "Add a note to your order" after add the item in your cart.
The vacuum chucks are designed and made for KW-4A spin coater of MicroNano Tools. Diameter of the shaft, on which the vacuum chucks are installed, is 16mm as shown in the following picture.
Custom designs of vacuum check are acceptable. Please send your design to firstname.lastname@example.org for evaluation.