Spin Coater with Temperature Control SCTC-150 - up to 150 C
This price is only available upon request. Contact us for a quote or fill the request form at the bottom of this page.
Introduction
SCTC-150 spin coater is a high-performance laboratory spin coater with temperature control. The system features a unique mechanical design and precise motion control system. It is equipped with precise temperature controlling system, enabling spin coating under precise and uniform temperature control. The SCTC-150 spin coater can be programmed to rotate in both clockwise and counter clockwise direction. After the spin coating process, the SCTC-150 can work as a regular hot plate for photolithography baking.
The operating interface can store 10 recipes, each recipe includes up to 10 steps. Operating parameters such as temperature, rotating speed, rotating time can be monitored in real time.
For customization of the main unit and vacuum chucks for your applications, please contact us.
For higher heating temperature and other customization, please contact us at 1-888-229-1281 or email info@micronanotools.com for more details.
Features
- High precision temperature control, up to 150 Celsius degree
- Rotate in both clockwise and counter clockwise direction
- Work as a standalone photolithography hot plate
- Special spindle design to minimize PR leakage
- Programmable multi-step spin coating process
- Chemical resistant HDPE spin bowl
- Chemical resistant transparent spin lid
Technical Specifications
|
Model |
SCTC-150 |
|
Maximum rotational speed |
5000 RPM |
|
Speed resolution |
1 RPM |
|
Maximum rotation time |
3,000 S |
|
Rotation time resolution |
0. 1 S |
|
Maximum acceleration |
5000 RPM/S |
|
Temperature control range |
Room temperature ~ 150 C |
|
Effective heating area |
Diameter 50mm |
|
Chuck for sample Dia. or lateral ≥ 10mm, Thickness ≥0.5mm for hard samples |
4-Jaw with limit hold the wafer, not vacuum |
|
Chuck for sample Dia. or lateral < 10mm |
4-Jaw with limit with Built-in silicone mat |
|
Wafer/substrate size |
Round or Square with diameter or lateral dimension between 10-35mm, maximum 40mm when using approach heating |
|
Dimensions |
268mm (W) x 340mm (D) x 255mm (H) |
|
Weight |
15Kg |
|
Power input |
100- 120V, single phase, 550W ( 110V type) 200-230V, single phase, 550W (220V type) |
|
Fuse |
Circuit breaker |
|
Note: Temperature inside the vacuum chamber may drop a few degrees when chuck starts to rotate because rotation of the chuck will bring turbulent air flow inside the spinning chamber. Please contact us for more details |
|
Chucks for Thin Samples (Option)
For samples thinner than 0.5 mm, a specialized chuck used in conjunction with conductive silicone mats is required.
Warranty
- One years standard warranty for both parts and services with life-time support
Additional Notes
- Lead time of the item is 20 business days
- All university clients from US and Canada are entitled to payment term of net 30 days automatically. No worry, No stress, No Risk.
- Seller from Canada, on site local services available upon request
- Free shipping for US and Canada, duty, and custom clearance all included in the price when applicable
- Accept custom OEM if there are any special requirements for your application
