High Temperature Vacuum Hot Plate HTVHP-1000C
This price is only available upon request. Contact us for a quote or fill the request form at the bottom of this page.
General Introduction
The High-Temperature Vacuum Hot Plate (HTVHP-1000C) is designed for baking small wafers up to 1 inch or 2 inches in a vacuum or inert gas environment. The system provides precise temperature control from room temperature up to 1000°C, making it ideal for advanced material processing and thermal treatment applications.
The HTVHP-1000C integrates a vacuum chamber, a sample stage with heating and cooling units, and a digital temperature controller for stable and repeatable operation. The SiC heating element is a consumable component, and its lifespan depends on the operating temperature and usage conditions.
Product features
- High Temperature Capability: Up to 1000°C continuous operation.
- ZnSe Observation Window: High infrared and visible transmittance for real-time optical monitoring.
- Vacuum Compatible: Maintains stable low-pressure environments to minimize oxidation.
- Precise Temperature Control: Uniform heating and excellent stability across the stage surface.
- Compact, Modular Design: Easily integrates with microscopes, spectrometers, or custom setups.
- Durable Construction: Built with high-temperature-resistant materials for long-term reliability.
Applications
- Materials Science: Observe phase transitions and structural changes at high temperatures.
- Semiconductor Processing: Ideal for annealing and thermal treatment of wafers and materials.
- Thin Film & Coating Research: Enables in-situ monitoring of film deposition and uniformity.
- Aerospace Material Testing: Simulates high-temperature vacuum conditions for performance evaluation
- High-Temperature Chemical Reactions: Suitable for catalytic and synthesis studies under controlled atmospheres.
- Battery & Energy Research: Supports testing of solid-state and high-temperature energy materials.
Technical Specifications
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Vacuum Chamber |
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Material of Chamber |
304 Stainless steel |
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Chamber size, internal |
1 inch: 147mmx72mmx22mm |
2inch: |
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Chamber size, external |
1 inch: 170mmx95mmx37mm |
2inch: |
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Size of viewing window |
Ø42mm Ø42mm |
Ø77mm |
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Vacuum port |
KF16 |
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Vacuum measuring port |
KF16 |
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Inlet and outlet fitting Chamber |
Metric: 3mm/6mm; option for Imperial: 1/8-1/4inch; customizable fitting |
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Chamber cooling mode |
Water cooling |
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Cooling water fitting |
6mm quick |
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Positive pressure of chamber |
≤0.1MPa |
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Chamber Vacuum |
Rotary pump ≤5Pa (5 Minutes); Turbo molecular pump ≤5E-3 Pa (30 Minutes) |
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Sample stage |
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Material |
High temperature insulation ceramic |
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Stage size |
1 inch: 28x28mm |
2inch: 55x55mm |
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Heating |
SiC |
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Distance between stage to view window |
1 inch: 15mm |
2inch: 23mm |
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Stage Thermocouple |
PT100 S type |
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Stage temperature |
Room temp. to 1200 ºC |
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Temperature control accuracy |
±0.5 ºC |
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Temperature rate |
Max 20 ºC/Min for heating |
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Temperature Controller |
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Temperature display |
7 inch screen |
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Temperature control |
PID controller, self-settling, 30 sections programmable temperature |
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Temperature resolution |
0.1 ºC |
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Temperature control accuracy |
±0.5 ºC |
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Temperature input |
S, option for PT100 type of K, B thermocouple |
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Temperature control output |
DC linear heating |
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Cooling mode |
Liquid nitrogen flow linear cooling control |
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Other |
Temperature acquisition, real time temperature curve + historical temperature curve, extendable for vacuum gauge reading output |
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Water Cooling |
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Cooling mode |
Compressor cooling |
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Cooling water flow |
19L/min |
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Cycle water tank |
6L |
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Water cooler size |
59CMx28.5CMx46CM |
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Water chiller weight |
26.6Kg |
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Power |
0.76KW |
Warranty
- One years standard warranty with life-time support
- Damage due to improper storage condition or maintenance is not covered by warranty
- Extended warranty available upon request
Additional Notes
- This high-temperature photolithography hot plate is intended for laboratory use, not intensive industrial applications. We offer custom-built solutions for industrial-grade requirements. Please contact us for details.
