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MNT-HP-VG170 photolithography Hot Plate

MNT-HP-VG170 photolithography Hot Plate


General Introduction

The MNT-HP-VG170 is a compact and easy-to-use photolithography hot plate. It is used in prebake, postbake, and hardbake of the photolithographic process. This product features high baking speed, uniformity, high temperature control accuracy, and highly repeatable experimental results. Built-in vacuum ensures close contact between wafer and heating surface.

Built-in vacuum ensures close contact between wafer and heating surface. Comparing with conventional oven, using hotplate to cure the films will result in reduced baking time, increased reproducibility, and more uniform and better film quality. It is because the MNT-HP-VG170 has a uniform temperature profile across the substrate and provides even heating to the films and coatings. The skin effect will be avoided since the films/coatings are heated from bottom up.

Product Features

- Manual controlled vacuum function ensures close contact between wafer and heating surface
High precision temperature control with digital display, ±0.2°C
Sealing lid with microcrystalline panel for heat radiation, ensuring High temperature uniformity ≤±1%
Embedded heating element, compact design, suitable for using in a inert gas glovebox (default version is for Nitrogen Gas)*
Heating surface is made from alumina, high corrosion resistance and hardness
Sealed interface between heating disk and microcrystalline panel


Model for using in a glovebox

For using in a glovebox of Argon gas, the control unit and the hot plate main unit are separated as shown in the following picture. They need to be connected using a aerospace connector on the glovebox. 

Partial List of Recent Clients 

University of California in San Diego Nano3 Facility, Hewlett Packard Enterprise, Sandia National Laboratories, Univeristy of Notre Dame, University of Southern Mississippi, Washington State University, Furcifer Inc., Alberta University, Arizona State University, State University of New York at Buffalo, California Institute of Technology, Carbon3D, Clemson University, Louisiana State University, Midwestern University, National Institute of Standards and Technology, Princeton International School, San Jose State University, Sero Immuno Diagnostics, State University of New York 


- One years standard warranty with life-time support
- Damage due to improper storage condition or maintenance is not covered by warranty
- Extended warranty available upon request

Additional Notes

* The default version of the MNT-HP-VG170 hot plate is for using inside a glovebox of Nitrogen gas only; It should not be placed inside a glovebox of Argon gas; For using inside a glovebox of Argon, please contact the seller for customization. 
- Lead time of the product is 20-25 business days; 
- Free shipping for US, Canada, and most European countries, duty, and custom clearance included in the price when applicable
- Accept custom OEM if there are any special requirements for your application

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