Manual Vacuum Probe System with High and Low Temperature Control VPTC-26RL - RFQ
This price is only available upon request. Contact us for a quote or fill the request form at the bottom of this page.
Introduction
The Mini manual vacuum probe system VPTC-26RL is designed to support probing of small wafers up to 1 inch. The vacuum chamber works with temperature control ranging from -190 ºC to 400 ºC.
For customization of the VPTC-26RL vacuum probe system for your applications, please contact us.
Please contact us at 1-888-229-1281 or email info@micronanotools.com for more details.
Features
- Wide temperature range from -190 ºC to 350 ºC
- Manual operation for maximum flexibility and affordability
Technical Specifications
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MNT-15080RL Vacuum Chamber |
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Model |
Heating model: From Room Temp. to 400 ºC |
Heating and cooling model: From -190 ºC to 350 ºC |
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Material |
Option available: 304 SS and 6061 Aluminum alloy |
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Chamber internal size |
127mmX57mmX20mm |
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Chamber external size |
150mmX80mmX32mm |
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Weight |
SS: 1.5 KG; Aluminum alloy: 0.5KG |
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Size of viewing window |
Ø42mm (Option for recessed window with shorter distance) |
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Vacuum port |
KF16 (Other options available) |
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Vacuum measurement |
KF16 |
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Chamber Inlet and outlet fitting |
Metric: 3mm/6mm; Imperial: 1/8-1/4inch; customizable fitting |
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Chamber cooling |
Chamber part use water cooling + Lid use air cooling |
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Cooling water fitting |
6mm quick connect fitting |
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Positive pressure of chamber |
≤0.05MPa |
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Chamber Vacuum |
Rotary pump ≤5Pa (5 Minutes); Turbo molecular pump ≤5E-3 Pa (30 Minutes) |
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Sample stage |
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Material |
Heating model: 304 Stainless steel, Silver and gold alloy, pure silver |
Heating and cooling model: silver and gold alloy, pure silver |
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Stage size |
26x26mm |
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Heating mode |
Resistance |
Resistance and liquid nitrogen |
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Distance between stage to view window |
11mm, option for recessed window at 6mm |
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Stage Thermocouple |
Class A PT100 |
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Stage temperature |
Room temp. to 400 ºC |
From -190 ºC to 350 ºC |
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Temperature accuracy |
±0.5 ºC |
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Temperature rate |
100 ºC/Min for high temperature; 5 ºC/Min for low temperature |
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Temperature Controller |
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Temperature display |
7 inch |
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Temperature control |
PID with self-settling |
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Temperature resolution |
0.1 ºC |
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Temperature control accuracy |
±0.5 ºC |
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Temperature signal |
PT100 available at type of K, S, and B |
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Heating output |
Direct current linear heating |
Direct current linear heating + Liquid Nitrogen flow controller |
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Dimension of TC |
32cmX170cmX380cm |
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Weight |
5.6Kg |
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Data |
Temperature acquisition, real time temperature curve + historical temperature curve |
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Probe and moving platform |
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Electrical signal |
BNC connector, BNC Tri-axial connector, SMA connector, banana connector, wire length 1.2m |
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Electrical performance |
Insulation resistance ≥4000MΩ; dielectric strength ≤200V; current noise ≤10pA |
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Quantity of probe |
Default 4 probes; expandable to 5 probes |
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Probe material |
Gold coated, options for other materials |
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Probe tip |
10 µm |
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X axis moving stoke |
20mm ±10mm (Manual push sliding platform) |
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X axis accuracy |
≥ 500 µm |
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R axis moving stoke |
120º ± 60 º |
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Z axis moving stoke |
2mm ±1mm |
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Z axis moving accuracy |
≤50μm (Manual adjusting probe level using screw) |
Warranty
- Two years standard warranty for both parts and services with life-time support
- Damage due to improper operation or maintenance is not covered by warranty
Additional Notes
- All university clients from US and Canada are entitled to payment term of net 30 days automatically.
- The item is assembled in Canada; on site local services available for US and Canada upon request
- Free shipping for US and Canada, duty, and custom clearance all included in the price when applicable
- Accept custom OEM if there are any special requirements for your application
